Industrial Excimer Lasers
Source: Lambda Physik USA, Inc.
The company offers the first commercially available 300 W XeCl industrial excimer laser- the STEEL (STable Energy Excimer Laser) series.
The company offers the first commercially available 300 W XeCl industrial excimer laser- the STEEL (STable Energy Excimer Laser) series. Generating up to 1000 mJ / 300 W / 300 Hz at 308 nm (XeCl), the STEEL lasers are designed for high throughput and high duty-cycle industrial production. An excellent pulse energy stability specification makes these lasers ideal for large area processing applications such as TFT annealing or simultaneous drilling of ink jet nozzles.
The series offers increased pulse stability and reliability with a significant reduction in operating costs. This has been achieved by:
- redesigning the laser tube for outstanding gas lifetimes and pulse energy stability
- optimizing beam shielding and the beam shutter to increase the mechanical stability and optic lifetimes
- implementing a new laser tube adjustment device to minimize maintenance time
- designing a cleanroom-compatible stainless steel cabinet
The series is available in two models: STEEL 670 generates a stabilized pulse energy of 670 mJ at 300 Hz with 200 W power and the STEEL 1000 generates a stabilized pulse energy of 1000 mJ at 300 Hz and 300 W power.
Lambda Physik Inc., 3201 W. Commercial Blvd., Fort Lauderdale, FL 33309. Tel: 954-486-1500. Fax: 954-486-1501.
This website uses cookies to ensure you get the best experience on our website. Learn more