Product/Service

LMT-4000 Micromachining Station

Source: Potomac Photonics, Inc.
Wavelength: 1047 nm to 193 nm
Wavelength: 1047 nm to 193 nm

Laser Options:

    UV Waveguide Laser (248 nm)

    Compact Excimer (248, 193 nm)

High-throughput, variable magnification beam delivery

Minimum feature size: 2 microns

Motion control:

    DC servo XYZU drives with precision encoders

    4-to-8-inch XY stage travel options

    +/- 1 micron repeatability

    Motorized Z focus

    Laser firing synchronized to XY motion

Video viewing:

    Through-lens illumination and viewing

    B/W or color options

    Frame grabber for single screen interface

Software:

    Four axis machine control

    CAD/CAM with DXF file conversion

    MicroInspector video measurement

    MicroOperator operator interface

    Machine vision and automated inspection

Potomac Photonics, Inc., 4445 Nicole Drive, Lanham, MD 20706. Tel: 301-459-3031; Fax: 301-459-3034.