LMT-5000 Large-Frame Micromachining Station
Source: Potomac Photonics, Inc.
Wavelength: 1047 nm to 193 nm
Wavelength: 1047 nm to 193 nm
High-throughput, variable magnification beam delivery Minimum feature size: 2 microns
Laser Options
- UV Waveguide Laser (248 nm)
Compact Excimer (248, 193 nm)
Frequency tripled Nd: YV04 laser (355 nm)
Diode-pumped Nd: YLF lasers (1064 nm)
High-throughput, variable magnification beam delivery Minimum feature size: 2 microns
Motion control:
- DC servo XYZU drives with precision encoders
4-to-16-inch XY stage travel options
+/- 1 micron repeatability
Motorized Z focus
Laser firing synchronized to XY motion
- Video viewing:
Through-lens illumination and viewing B/W or color options Frame grabber for single screen interface
- Four axis machine control
CAD/CAM with DXF file conversion
MicroInspector video measurement
MicroOperator operator interface
Machine vision and automated inspection
Potomac Photonics, Inc., 4445 Nicole Drive, Lanham, MD 20706. Tel: 301-459-3031; Fax: 301-459-3034.
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