Positioning Systems
The company's UHV Positioning Systems can withstand operation to 1 x 10-10 Torr vacuum levels. Designed with non-magnetic piezo motors, the UHV Systems operate with low overall system magnetics. All mechanical parts are UHV-rated to eliminate outgassing. Tungsten Disulfide (TD2), a dry UHV compatible lubricant, is applied to all rolling element surfaces, to prevent wear without any vacuum grease.
Designed with a small footprint (350mm long), the systems provide full travel for 300mm wafers. Systems feature crossed roller bearings and non-contact linear encoders to 0.1 micron resolution. The precision crossed rollers are manufactured in stainless steel to reduce magnetic field effects. Available in multi-axis configurations, the systems can provide highly accurate horizontal and/or vertical motion.
The systems are suitable for a variety of applications requiring precision motion and vacuum compatibility. Potential applications include electron beam lithography, ion beam lithography, wafer metrology and wafer inspection.
The company offers a complete range of integrated motion solutions including precision planetary gearheads and gearmotors, complete servo systems including linear and rotary motors and amplifiers, positioning systems for XYZ and rotary motion, and crossed roller bearings and slides. The company's unique cellular manufacturing provides customers with quality integrated products and solutions for applications requiring the highest precision, accuracy and durability. Platforms are applied to a wide variety of industries, including semiconductor, packaging, aerospace, converting machinery, medical automation, automotive and metrology.
Bayside Motion Group, 27 Seaview Blvd., Port Washington, NY 11050. Tel: 516-484-5353. Fax: 516-484-5496.